durusmail: mems-talk: releasing layer for PDMS mold
releasing layer for PDMS mold
2010-06-30
2010-06-30
2010-07-01
2010-07-01
2010-07-01
2010-07-01
2010-07-01
releasing layer for PDMS mold
Maggie Q. Lai
2010-07-01
Thank you Hyoungwon.
I will check liquid phase SAM.

Maggie

2010/6/30 박형원 

>  Hi, Maggie,
>
>
>
> If you have a hard time dealing with vapor phase SAM coating, try liquid
> phase SAM coating.
>
> Since you are trying to coat glass master mold, liquid phase SAM will work.
>
>
>
> I have same fluorinated tricolosilane,
> (HEPTADECAFLUORO-1,1,2,2-TETRAHYDRODECYL)TRICHLOROSILANE, and I have no hard
> time to form SAM layer on the glass substrate with liquid phase SAM coating.
> Moreover, the durability of SAM is stronger in liquid phase SAM than in
> vapor phase SAM.
>
>
> There are plenty of papers concerning liquid phase SAM technique, so you
> will easily find the recipe.
>
>
> Good luck,
>
> Hyoungwon Park
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