Thank you Hyoungwon. I will check liquid phase SAM. Maggie 2010/6/30 박형원> Hi, Maggie, > > > > If you have a hard time dealing with vapor phase SAM coating, try liquid > phase SAM coating. > > Since you are trying to coat glass master mold, liquid phase SAM will work. > > > > I have same fluorinated tricolosilane, > (HEPTADECAFLUORO-1,1,2,2-TETRAHYDRODECYL)TRICHLOROSILANE, and I have no hard > time to form SAM layer on the glass substrate with liquid phase SAM coating. > Moreover, the durability of SAM is stronger in liquid phase SAM than in > vapor phase SAM. > > > There are plenty of papers concerning liquid phase SAM technique, so you > will easily find the recipe. > > > Good luck, > > Hyoungwon Park