durusmail: mems-talk: SU-8 3000 vs 2000 adhesion
SU-8 3000 vs 2000 adhesion
2010-12-11
2010-12-11
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2010-12-15
SU-8 3000 vs 2000 adhesion
Adrian Papas
2010-12-15
Hey Bill,

What kind of substrates do you implement the APTES adhesion promoter +
SU8 combination, and which SU8 series do you use? I'm just curious
because our process/research does the reverse where we lay down the SU8
first and then perform an APTES treatment on top of everything (we use
the APTES for another purpose, not as an adhesion promoter). It might be
interesting to perform it in the reverse fashion. Thanks.

Adrian Papas

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