Tricia:

Silver does not etch well in fluorine.  The same is true for chlorine.  The
etch by-products are not very volatile at room temperature.

Robert

On Fri, Jan 7, 2011 at 11:22 AM, Tricia Youngbull <
tyoungbull@nthdegreetech.com> wrote:

> Does XeF2 etch Ag? Does anyone have etch rate data?
>
> Thank you