Why not choose lift off?


------Original Message------
From: Robert Ditizio 
To: General MEMS discussion 
ReplyTo: Robert Ditizio 
Re: [mems-talk] etch rate of Ag in XeF2
Jan 7, 2011 16:57

Tricia:

Silver does not etch well in fluorine.  The same is true for chlorine.  The
etch by-products are not very volatile at room temperature.

Robert