Tricia, It does! But in a complex manner. I don't have the etch rate, but I know from experience that the Ag undergoes some sort of chemical reaction and then etches away. It is slower than the etch rate of silicon, but still fairly fast. Regards, Paul On 1/7/2011 2:22 PM, Tricia Youngbull wrote: > Does XeF2 etch Ag? Does anyone have etch rate data? > > Thank you ================================== Paul Sunal, PhD Senior MEMS Engineer MEMS and Nanotechnology Exchange / CNRI 1895 Preston White Drive Suite #100 Reston, VA 20191 Tel: 703.262.5323 Fax: 703.262.5367 ==================================