RIE or ICP?


------Original Message------
From: Paul Sunal 
To: General MEMS discussion 
ReplyTo: Paul Sunal 
Re: [mems-talk] etch rate of Ag in XeF2
Jan 7, 2011 20:06

Tricia,

It does!  But in a complex manner.  I don't have the etch rate, but I
know from experience that the Ag undergoes some sort of chemical
reaction and then etches away.  It is slower than the etch rate of
silicon, but still fairly fast.

Regards,

Paul