Hi Bill,

Do you know any other method other than the oxygen plasma method for bonding
Silicon wafer with an developed SU8 pattern and glass slide coated with SU8?

Regards,
Gauri



________________________________
From: Bill Moffat 
To: General MEMS discussion 
Sent: Tuesday, August 16, 2011 8:53 AM
Subject: Re: [mems-talk] Glass-glass bonding problem

The fault may be with the bonding unit.  I have several customers doing Silicon
Wafer to Silicon wafer bonding using about 10 minutes plasma no heat.  Others
doing a flexible polymer to glass with a 20 second plasma no heat, contact me
for further information.  Bill Moffat