I think you can increase exposure time to 20s or 30s and reduce PEB to 2mins at 95C. Best regards, Jin Yu -----Original Message----- From: Xiaohui Lin [mailto:xiaohui.lin@mail.utexas.edu] Sent: 09 November 2011 05:01 To: General MEMS discussion Subject: [mems-talk] Help with SU8 2005 recipe on glass substrate I am using SU8 2005 on 1mm thick glass substrate coated with 50nm Cr/Au. spin coat 4krpm bake 95C, 3min exposure 8s PEB: 65C, 7min develop: 40s I am getting a pretty rough sidewall as the picture in the following link. Could anyone suggest what is the problem? Thanks. https://plus.google.com/u/0/photos/113316121597573259487/albums/56728554 10267307473