Vacuum psi? * nahid vahabiwrote: >Hello all, >I deposit a 250 nm PECVD SiN layer as the dielectric between two gold layers and the metal layers seem to be short through the nitride each time. I increased the nitride thickness to 400 nm and still the same. I gathered that PECVD nitride is quite notorious for the pinholes so I multi-layered the nitride (6 times of 40 nm each) to get rid of pinholes. It worked only on 1 wafer and then the same problem again. So I appreciate any comments on this and whether you think changing the dielectric is a good option. > >Thank you, >Nahid >_______________________________________________ >Hosted by the MEMS and Nanotechnology Exchange, the country's leading >provider of MEMS and Nanotechnology design and fabrication services. >Visit us at http://www.mems-exchange.org > >Want to advertise to this community? See http://www.memsnet.org > >To unsubscribe: >http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk