Dear Nahid Due to my experiences, your main problem is pinholes.If you have still pinholes even you increase your thickness, this means that your pinholes are quite big and deep.So I recommend you that change your deposition parameters like RF Power and Deposition/Growth Pressure.Process Temperature has a big role about pinholes density also.You can easily find some details about Process Parameters vs Pinholes in the literature.If you can't I'll try to share with you.By the way I don't recommend to change your dielectric layer as your process seems to me like a capacitor structure.When you start to change your SiN process details a little bit, I believe you will find a good point.I would also ask your metal layers thickness?This can be another problem if your metal thickness is so too much relative to SiN. I hope this can help you.Regards. --- > Date: Mon, 29 Apr 2013 15:49:27 -0700 > From: nahid.vahabi@yahoo.com > To: mems-talk@memsnet.org > Subject: [mems-talk] Silicon Nitride shorting metal layers > > Hello all, > I deposit a 250 nm PECVD SiN layer as the dielectric between two gold layers and the metal layers seem to be short through the nitride each time. I increased the nitride thickness to 400 nm and still the same. I gathered that PECVD nitride is quite notorious for the pinholes so I multi-layered the nitride (6 times of 40 nm each) to get rid of pinholes. It worked only on 1 wafer and then the same problem again. So I appreciate any comments on this and whether you think changing the dielectric is a good option. > > Thank you, > Nahid > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk