durusmail: mems-talk: Silicon Nitride shorting metal layers
Silicon Nitride shorting metal layers
2013-04-29
2013-04-30
2013-04-30
2013-04-30
2013-04-30
Silicon Nitride shorting metal layers
nahid vahabi
2013-04-30
Hello all,

Thank you for all the amazing comments. More details about my process:

pressure set: 500 mTorr,
RF power=60 watt
temperature:300 C

Thank you,
Nahid
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply