Hello all, Thank you for all the amazing comments. More details about my process: pressure set: 500 mTorr, RF power=60 watt temperature:300 C Thank you, Nahid _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk