Hi Bob,

Try this- go to google patent search (www.google.com/patents) and type in:
"spin on glass" MEMS

I got ~6400 results with that search.  Lots of potential applications.  I see it
used for bonding, sacrificial layers, packaging, sealing,  planarization, etch
stops, capping/passivation layers, someone even using it as a substitute for a
TEOS process.

-Erik


> On Jun 5, 2015, at 1:26 PM, Bob Henderson 
wrote:
>
> Thanks for the tip Shay. I appreciate it. Bob Henderson
>
> -----Original Message-----
> From: mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org
> [mailto:mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org] On
> Behalf Of Shay
> Sent: Thursday, June 04, 2015 8:33 PM
> To: General MEMS discussion
> Subject: Re: [mems-talk] Spin on Glass applications for MEMS
>
> Bob
>
> SOG can be used for wafer bonding.
>
> Shay
>
>
>
>>> On Jun 4, 2015, at 19:01, Bob Henderson
>>  wrote:
>>
>> I have recently relocated my equipment business next door to a company
>> that manufactures a variety of spin on glass (SOG) formulations. I am
>> trying to get up to speed on applications that require SOG for various
>> MEMS applications. I understand a Boron SOG can be used as an etch
>> stop in silicon for making membranes but I need to understand if there
>> are other applications SOG is being used for such as to build
>> transistors due to its low temperature applications. Any help would be
>> appreciated. Bob Henderson
>>
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