Bill,
Plasma Bonding has much tighter material and surface requirements than SOG
bonding. SOG bonding is more like adhesive or glass fritt bonding.
shay

-----Original Message-----
From: mems-talk-bounces+shay=mizur.com@memsnet.org
[mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of Bill
Moffat
Sent: Saturday, June 06, 2015 6:46 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Spin on Glass applications for MEMS

Bob a far better and more uniform wafer bonding is plasma bonding. Bill

Sent from my iPad

> On Jun 5, 2015, at 2:08 PM, Bob Henderson
 wrote:
>
> Thanks for the tip Shay. I appreciate it. Bob Henderson
>
> -----Original Message-----
> From: mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org
> [mailto:mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.or
> g] On Behalf Of Shay
> Sent: Thursday, June 04, 2015 8:33 PM
> To: General MEMS discussion
> Subject: Re: [mems-talk] Spin on Glass applications for MEMS
>
> Bob
>
> SOG can be used for wafer bonding.
>
> Shay
>
>
>
>>> On Jun 4, 2015, at 19:01, Bob Henderson
>>  wrote:
>>
>> I have recently relocated my equipment business next door to a
>> company that manufactures a variety of spin on glass (SOG)
>> formulations. I am trying to get up to speed on applications that
>> require SOG for various MEMS applications. I understand a Boron SOG
>> can be used as an etch stop in silicon for making membranes but I
>> need to understand if there are other applications SOG is being used
>> for such as to build transistors due to its low temperature
>> applications. Any help would be appreciated. Bob Henderson
>>
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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

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_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

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