durusmail: mems-talk: Spin on Glass applications for MEMS
Spin on Glass applications for MEMS
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Spin on Glass applications for MEMS
Rajul Patkar
2015-06-08
Bob,

We fabricate MEMS device (microcantilever) by flip chip method ie release
these structures
from the substrate with the help of a sacrificial layer. SOG can be used as
a sacrificial layer.

Rajul.

On Fri, Jun 5, 2015 at 10:56 PM, Bob Henderson <
bob.henderson@etchedintimeinc.com> wrote:

> Thanks for the tip Shay. I appreciate it. Bob Henderson
>
> -----Original Message-----
> From: mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org
> [mailto:mems-talk-bounces+bob.henderson=etchedintimeinc.com@memsnet.org]
> On
> Behalf Of Shay
> Sent: Thursday, June 04, 2015 8:33 PM
> To: General MEMS discussion
> Subject: Re: [mems-talk] Spin on Glass applications for MEMS
>
> Bob
>
> SOG can be used for wafer bonding.
>
> Shay
>
>
>
> > On Jun 4, 2015, at 19:01, Bob Henderson
>  wrote:
> >
> > I have recently relocated my equipment business next door to a company
> > that manufactures a variety of spin on glass (SOG) formulations. I am
> > trying to get up to speed on applications that require SOG for various
> > MEMS applications. I understand a Boron SOG can be used as an etch
> > stop in silicon for making membranes but I need to understand if there
> > are other applications SOG is being used for such as to build
> > transistors due to its low temperature applications. Any help would be
> > appreciated. Bob Henderson
> >
> > _______________________________________________
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> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
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>
>
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
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>



--
Regards,
Rajul.
_______________________________________________
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