Hello Nathan, dicing away the area of the edge bead is the only way. Regards, André -----Ursprüngliche Nachricht----- Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org [mailto:mems- talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im Auftrag von Nathan McCorkle Gesendet: Mittwoch, 10. Juni 2015 20:29 An: General MEMS discussion Betreff: Re: [mems-talk] PDMS bonding to silicon for micro-channel heat sinks On Tue, Jun 9, 2015 at 10:37 PM, André Bödeckerwrote: > Hello Leily, > > anodic bonding is an expensive, but very reliable process. Structuring > of glass wafers is not a big problem. You can contact me if you are interested. > > Bonding with PDMS normally needs only an oxygen plasma activation of > the surfaces. There are also some special adhesion promoters if > necessary. But a tight bonding will only work if the PDMS has a good > uniformity and that will be a difficulty over a whole 100 mm wafer, I > assume. We use the Sylgard 184 2k-silicone ("PDMS"; Dow Corning). Even > spin-coating leads to an edge bead which inhibits a complete contact between two wafers. How do you get around this? Do you adjust the spin-coating or viscosity of the resin? Or do you simply cut/dice the bead area away? _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk