Don’t worry what I said about mask to wafer bias. I was talking about an optimum
CD process window. Ignore that for now.
Like I said, the exposure depends on your process like 1) Exposure tool:
contact printer, stepper, etc. 2)Bake temps used, 3) developer used and time :
some developers are stronger than others. There are other parms that also go
into you process such as a swing curve.
You have to find the optimum exposure for your process by running wafers
at different exposures. Have you done this ? Doesn’t the size (CD) of your
structure change when you change exposure time?
Robert
From: KarthiKeyan K [mailto:karthimems@gmail.com]
Sent: Wednesday, July 01, 2015 12:36 AM
To: General MEMS discussion; Black, Robert
Subject: Re: [mems-talk] SU8 2075 Pattern - Reg:
Dear Sir,
I have change my exposure timing from 25-45sec with different thickness of SU8
layer such as 80 -140
micro meter thickness.
What to you mean by bias difference b/w mask vs wafer?? because we did not apply
any bias b/w mask & wafer.
we are applying full intensity of UV light on SU8 layer and the wave length of
UV is 365 nm.
Can you tell me how to calculate exposure time for different thickness of SU8
2075 layer.??
Looking forward to your reply.
Best Regards,
Karthikeyan K
On Mon, Jun 29, 2015 at 8:42 PM, Black, Robert
> wrote:
It is typical that you will have a bias difference between what is in the mask
vs. wafer. How much depends on your process. Can you change exposure?
Robert
-----Original Message-----
From: mems-talk-bounces+r-black1=ti.com@memsnet.org
[mailto:mems-talk-bounces+r-black1=ti.com@memsnet.org] On Behalf Of KarthiKeyan
K
Sent: Wednesday, June 24, 2015 10:05 PM
To: General MEMS discussion
Subject: [mems-talk] SU8 2075 Pattern - Reg:
Dear Friends,
Actually i am working in SU8 2075 negative photoresist and am facing to achieve
exact size of mask pattern on my SU8 photoresist for the example my mask pattern
size is 50 micro meter means i have achieved 60 micro meter.
So Please suggest how to get exact size of the mask pattern on my SU8
Photoresist layer??? any parameter to get exact size of the mask pattern on my
SU8 Photoresist.??
Looking forward to your suggestions.
Thanking you,
Best Regards,
Karthi
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