Joshua, We have tools in the field performing this develop process with good process control. The key factor is the way the develop process is done and using a spray technique or streaming dispense will not work. We rapidly build a puddle with zero impact and the agitate the puddle inorder to refresh chemistry at the surface being "etched" by the developer. Gary Gary Hillman S-Cubed 9 Mars Court ( USPS PO Box 365) Montville, NJ 07045 Phone 973-263-0640 ex 535 Mobile 201-755-3760 ________________________________________ From: mems-talk-bounces+garyh=s-cubed.com@memsnet.org [mems-talk- bounces+garyh=s-cubed.com@memsnet.org] on behalf of Joshua Wells [joshualwells@gmail.com] Sent: Friday, July 10, 2015 7:42 AM To: mems-talk@memsnet.org Subject: [mems-talk] Liftoff Process Using LOR 10B and 1800 Series Resist I am trying to develop a repeatable liftoff process using LOR10B and an 1800 series positive resist for use with 1:1 microdev developer (necessary for material compatibility). The trouble arises in the repeatability of the process. Time of development varies significantly between runs with no process parameters changing yielding far too much undercut for our application. We have the LOR thinner and have by trying to work with that as well as full thickness LOR. Does anyone have a repeatable process or suggestions? Joshua _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk