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mems-talk
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thin film thermocouples on Si-wafer (Bernard Revaz)
Q: Tools, Simulator FAQ (Burkhard Volland)
110 Si etching with 20%KOH (Knighton, Ed)
Etching <100> and <110> wafer in KOH and surface roughness (George Diercks)
Thin PDMS membranes (Heiko van der Linden)
110 Si etching with 20%KOH (Connie Kathleen Smith)
110 Si etching with 20%KOH (Knighton, Ed)
Making 0.15um thick SiO2 film by anodic oxidation. (Fan Frank)
Bonding of quarzt crystal and silicon (dan.w.chilcott@delphiauto.com)
thin film thermocouples on Si-wafer (Jon Doe)
etch psg oxide with Al (kirt_williams@agilent.com)
Etching <100> and <110> wafer in KOH and surface roughness (Roger Shile)
110 Si etching with 20%KOH (Andrew J. Nielson)
Lab equipment needed (Behraad Bahreyni)
thin film pzt bimorph info (EH Yang)