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mems-talk
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Re 5" photomask making (Hell, Erwin)
etching Si-N, but not Al2O3 (Justin Borski)
Deposition of ZnO (mikoyan)
5" photomask making (Frank DiPiazza)
etching Si-N, but not Al2O3 (BobHendu@aol.com)
5" photomask making (Kevin A. Shaw)
etching Si-N, but not Al2O3 (kirt_williams@agilent.com)
Re: Glass to Glass Bonding Service (Yuebin Ning)
low resolution photomask printer (Soojin Oh)
etching Si-N, but not Al2O3 (Robert C Cole)
5" photomask (Andrew Kuchling)
green gold (sp)
low resolution photomask printer (Alan D. Raisanen)
5" photomask (Michael Barger)
Diffusion barrier for Cr/Au or Ti/Au (Xing Yang)