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mems-talk
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Etching rate for BCB (Zhang Zhenfeng)
RE: GLASS FRIT BONDING PIEZORESISTIVE SEMICONDUCTOR (Gabriel, Markus)
LOR lift-off (Patrick Carlberg)
Oxidizable metals (thewur)
Plasma Etching of Al2O3 (kirt_williams@agilent.com)
Etching rate for BCB (Ivan Shubin)
Chemical Durability of SiO2 (Kristin J. Lynch)
Etching holes in aluminum (Pablo B)