durusmail: mems-talk: Peel off PDMS
Peel off PDMS
2009-07-09
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Peel off PDMS
Shah, Forum N
2009-07-09
Hi,

I am spinning PDMS on Si wafer on which the sensors would be fabricated.

Can anyone suggest a way to peel off the PDMS layer from the Si wafer  once the
fabrication process is over?

When I tried using acetone it rather just removes the PDMS in an irregular
fashion and does not let me peel off the PDMS layer completely keeping it
intact.

Thanks,

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