Have you tried using sigmacote (or jerseycote)?

On Thu, Jul 9, 2009 at 3:47 PM, Shah, Forum N wrote:
> Hi,
>
> I am spinning PDMS on Si wafer on which the sensors would be fabricated.
>
> Can anyone suggest a way to peel off the PDMS layer from the Si wafer  once
the fabrication process is over?
>
> When I tried using acetone it rather just removes the PDMS in an irregular
fashion and does
> not let me peel off the PDMS layer completely keeping it intact.
>
> Thanks,
>
> Forum