durusmail: mems-talk: Peel off PDMS
Peel off PDMS
2009-07-09
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Peel off PDMS
seyeda@ualberta.ca
2009-07-09
Hi

It depends how thick is your PDMS layer. if it is thick enough perhaps
more than 50 micron you can simply peel it off by hand but you should
have silanized your silicon wafer before application of PDMS. if your
layer is not thick enough it is possible to pour more PDMS on it and
cure it and then remove the two layers that are now bonded together.

Good luck!

Seyed


Quoting "Shah, Forum N" :

> Hi,
>
> I am spinning PDMS on Si wafer on which the sensors would be fabricated.
>
> Can anyone suggest a way to peel off the PDMS layer from the Si
> wafer  once the fabrication process is over?
>
> When I tried using acetone it rather just removes the PDMS in an
> irregular fashion and does not let me peel off the PDMS layer
> completely keeping it intact.
>
> Thanks,
>
> Forum
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