Thanks Andrew. I went through the product details but it says it shows good results with glass substrate. Have you used it with Silicon wafer as a substrate? -----Original Message----- From: Andrew Sarangan [mailto:asarangan@gmail.com] Sent: Friday, July 10, 2009 11:57 PM To: General MEMS discussion Subject: Re: [mems-talk] Peel off PDMS You might be thinking of silane gas, which is different from the liquid materials used to silanize the surface. You could use Trichloro trifluoro propyl silane (from Sigma), or Sigmacote, or Jerseycote. You can wet the surface with this material, or spin coat, or put it in a dessicator and pull a vacuum to evaporate it. I don't think the application method is that critical. We've tried Jerseycote and it works well.