Thanks Seyed. But I cannot use silane due to policy of my institution. Is there
any other way you know it might work?

Forum

-----Original Message-----
From: seyeda@ualberta.ca [mailto:seyeda@ualberta.ca]
Sent: Thursday, July 09, 2009 4:46 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Peel off PDMS

Hi

It depends how thick is your PDMS layer. if it is thick enough perhaps
more than 50 micron you can simply peel it off by hand but you should
have silanized your silicon wafer before application of PDMS. if your
layer is not thick enough it is possible to pour more PDMS on it and
cure it and then remove the two layers that are now bonded together.

Good luck!

Seyed