How wide are they? -----Original Message----- From: mems-talk-bounces+shay=mizur.com@memsnet.org [mailto:mems-talk-bounces+shay=mizur.com@memsnet.org] On Behalf Of nahid vahabi Sent: Saturday, September 18, 2010 1:56 AM To: General MEMS discussion Subject: [mems-talk] releasing cantilever beams without release holes Hello folks, Just wondering if any of you guys have released a structure like cantilever beams without release holes. There was a mistake in the mask and now we try to find a good recipe for dry or wet etch to release the structure. Any comments are appreciated. Nahid