Dear Nahid, If the cantilever width is about 200 um as you mentioned in your next message, I do not think you will be able to release the structure in a reasonable process times (particularly with dry etch). 200 um is very large width to have such an undercut with dry etch. However, if your sacrificial layer can be wet-etched without giving any damage to any other layers, you can try very long etch (e.g. overnight) to release your cantilevers (you may provide agitation and swirling in the etchant by using a magnetic stirrer). Best, Kagan Topalli Postdoctoral Researcher ElectroScience Laboratory The Ohio State University 1320 Kinnear Road Columbus, Ohio 43212 http://www.electroscience.osu.edu/ e-mail: topalli.1@osu.edu On 2:59 PM, nahid vahabi wrote: > Hello folks, > > Just wondering if any of you guys have released a structure like cantilever > beams without release holes. There was a mistake in the mask and now we try to > find a good recipe for dry or wet etch to release the structure. > > Any comments are appreciated. > > Nahid