Nahid, lots of work with cantilevers on resist led to multiple chamber plasma strippers to allow long time in plasma for dry strip. Lots of work with wet strippers led to vacuum/hot dehydrators followed by anti stiction coating in vacuum/hot chemical deposition system for complete hydrophobic surface. Bill Moffat, CEO Yield Engineering Systems, Inc. 203-A Lawrence Drive, Livermore, CA 94551-5152 (925) 373-8353 www.yieldengineering.com -----Original Message----- From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of nahid vahabi Sent: Monday, September 20, 2010 4:10 PM To: General MEMS discussion Subject: Re: [mems-talk] releasing cantilever beams without release holes Thanks to your emails. I have some Cr/Au cantilevers anchored to substrate, the sacrificial layer is a very thin layer of photo-resist(HPR504) . They are pretty wide and large cantilevers (200*400 um). I am afraid that any wet etch (even followed by critical dry point) would result in sticking problems. Dry etch is also usually directional so I may not get rid of the resist completely.