Hi Sheng, You need to include one important piece of information. What is the interface that the adhesion failed? When you peel back the gold what material is on the back? Regards, Dave David Roberts (Wafer Plating Specialist) Prodigy Surface Tech (408) 469-3203 cell 807 Aldo Ave., Suite 103 Santa Clara, CA 95054 Phone (408) 492-9390 FAX (408) 492-9391 -----Original Message----- From: Sheng Zhang [mailto:szhangut@gmail.com] Sent: Tuesday, March 08, 2011 3:20 PM To: General MEMS discussion Subject: [mems-talk] Cr/Au peel off when electroplating? Hi, All, I'm having trouble electroplating Au onto Cr/Au (15nm/55nm) seed layer on quartz substrate. I used lift off process to pattern the metal, and the patterns are fine after lift off. But when electroplating, the pattern comes off (in one piece, so definitely an adhesion problem). Does the electroplating solution or temperature affect adhesion? Any advice would be greatly appreciated! Thanks!