Hi Sheng, You got your answer. Your adhesion problem is at the SiOx / Cr interface. This is a seed deposition problem. If the plated stress was so high to cause adhesion failure, your substrate would be torn apart. This is not a plating problem. DR David Roberts (Wafer Plating Specialist) Prodigy Surface Tech (408) 469-3203 cell 807 Aldo Ave., Suite 103 Santa Clara, CA 95054 Phone (408) 492-9390 FAX (408) 492-9391 -----Original Message----- From: Sheng Zhang [mailto:szhangut@gmail.com] Sent: Thursday, March 10, 2011 7:44 PM To: General MEMS discussion Subject: Re: [mems-talk] Cr/Au peel off when electroplating? I believe the metal pattern peeled off all together from the quartz substrate. And for your reference, my current density is pretty low, around 1 mA/cm2, and I need a thickness of 5um, so I plated for about one and a half hour. Is it possible that putting the sample in the warm electrolyte for that long would cause lamination? Thanks! Sheng