Dear all, I am using photolithography and PDMS mold technique to get a PDMS mold. I'm having some troubles when I peel off the PDMS mold from the SU-8 master. Even a very careful handing I can not get a good PDMS mold. After peeling off, the pattern on the PDMS mold is always broken. The SU-8 master's smallest width is 10um. Is it feasible in theory? Can anyone give me some suggestions? Thank you in advance Regards