Hi, it may depend on how thick your PDMS is, the mixing ratio, and curing temperature. Can you provide more details? Barbara ---------- Initial Header ----------- >From : mems-talk-bounces+korteseb=libero.it@memsnet.org To : "mems-talk" mems-talk@memsnet.org Cc : Date : Thu, 17 Mar 2011 11:57:20 +0800 (CST) Subject : [mems-talk] PDMS mold peeling off process > Dear all, > > I am using photolithography and PDMS mold technique to get a PDMS mold. > > I'm having some troubles when I peel off the PDMS mold from the SU-8 master. Even a very careful handing I can not get a good PDMS mold. After peeling off, the pattern on the PDMS mold is always broken. > > The SU-8 master's smallest width is 10um. Is it feasible in theory? > > Can anyone give me some suggestions?