I've peeled of patterns that were 20 um and very long so it should work. What I did, because I was having similar problems to you, was to coat the master in a thin Teflon layer and it then released beautifully. My master was all glass though so that may be easier ... /Mikael -----Original Message----- From: mems-talk-bounces+evander=stanford.edu@memsnet.org [mailto:mems- talk-bounces+evander=stanford.edu@memsnet.org] On Behalf Of 첸로 Sent: Wednesday, March 16, 2011 8:57 PM To: mems-talk Subject: [mems-talk] PDMS mold peeling off process Dear all, I am using photolithography and PDMS mold technique to get a PDMS mold. I'm having some troubles when I peel off the PDMS mold from the SU-8 master. Even a very careful handing I can not get a good PDMS mold. After peeling off, the pattern on the PDMS mold is always broken. The SU-8 master's smallest width is 10um. Is it feasible in theory? Can anyone give me some suggestions?