Hi,

Check very carefully your humidity and temperature from your cleanroom
where you prepare the master. Look to the validity date of the resist that
you are using.

How long you bake the PDMS?

On Mar 17, 2011 4:57am, "첸로"  wrote:

> Dear all,
>
> I am using photolithography and PDMS mold technique to get a PDMS mold.
> I'm having some troubles when I peel off the PDMS mold from the SU-8
> master. Even a very careful handing I can not get a good PDMS mold. After
> peeling off, the pattern on the PDMS mold is always broken.
> The SU-8 master's smallest width is 10um. Is it feasible in theory?
>
> Can anyone give me some suggestions?
>
> Thank you in advance