durusmail: mems-talk: PDMS mold peeling off process
PDMS mold peeling off process
2011-03-17
2011-03-17
2011-03-17
2011-03-22
2011-03-17
PDMS mold peeling off process
Xiaohui Lin
2011-03-17
Righeira:

 What is the anti-stick layer for SU-8?  On top of patterned SU8?

On Thu, Mar 17, 2011 at 7:35 AM, righeira carnegie 
wrote:

> Did you use the anit-stick layer for SU-8?  even if you would have used and
> still if you have problem, it may be it is because FDTS is not
> uniform.  This lack of homogenity is because of a very bad hydroxylation
> of the surface of the SU-8. You should try rinsing in Sulfuric acid for
> homogenity and try the FDTS again.
>
> It works probably.  just my view. I read it in a paper. email me directly
> for the paper.
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