Righeira: What is the anti-stick layer for SU-8? On top of patterned SU8? On Thu, Mar 17, 2011 at 7:35 AM, righeira carnegiewrote: > Did you use the anit-stick layer for SU-8? even if you would have used and > still if you have problem, it may be it is because FDTS is not > uniform. This lack of homogenity is because of a very bad hydroxylation > of the surface of the SU-8. You should try rinsing in Sulfuric acid for > homogenity and try the FDTS again. > > It works probably. just my view. I read it in a paper. email me directly > for the paper.