Did you use the anit-stick layer for SU-8? even if you would have used and still if you have problem, it may be it is because FDTS is not uniform. This lack of homogenity is because of a very bad hydroxylation of the surface of the SU-8. You should try rinsing in Sulfuric acid for homogenity and try the FDTS again. It works probably. just my view. I read it in a paper. email me directly for the paper. righeira carnegieOn Thu, Mar 17, 2011 at 4:57 AM, 첸로 wrote: > Dear all, > > I am using photolithography and PDMS mold technique to get a PDMS mold. > > I'm having some troubles when I peel off the PDMS mold from the SU-8 > master. Even a very careful handing I can not get a good PDMS mold. After > peeling off, the pattern on the PDMS mold is always broken. > > The SU-8 master's smallest width is 10um. Is it feasible in theory? > > Can anyone give me some suggestions?