durusmail: mems-talk: Thin film deposition at room temperature
Thin film deposition at room temperature
2012-08-23
Yingtao Tian
Thin film deposition at room temperature
Alex Mellnik
2012-08-23
What's under the film?  If it's not sensitive to oxygen plasmas you
can evaporate carbon and then ash it off.

-Alex

On Thu, Aug 23, 2012 at 11:11 AM, Yingtao Tian  wrote:
> Hi All,
>
> I am trying to get round of how to put a thin film down at room temperature. I
need a localised thin film with following properties:
>
> 1. non-transparent
> 2. as thin as possible - say in the order of few microns
> 3. easy to remove
> 4. can be applied at around room temperature
>
> I am thinking of some possible spray, but have not got any clue. I would
appreciate if you have some  interesting idea about it.
>
>
> Thanks a lot.
>
> Regards,
> Yingtao
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