durusmail: mems-talk: Thin film deposition at room temperature
Thin film deposition at room temperature
2012-08-23
Yingtao Tian
Thin film deposition at room temperature
Yingtao Tian
2012-08-23
Hi Nabhiraj,

I need some non-transparent film on photoresist to block the UV during the next
step exposure.

Thanks,
Yingtao

-----Original Message-----
From: mems-talk-bounces+y.tian=bham.ac.uk@memsnet.org [mailto:mems-talk-
bounces+y.tian=bham.ac.uk@memsnet.org] On Behalf Of Nabhiraj Yalagoud
Sent: 23 August 2012 18:36
To: General MEMS discussion
Subject: Re: [mems-talk] Thin film deposition at room temperature

Hello,
What film on what substrate you want?
Nabhiraj

On Thu, Aug 23, 2012 at 8:41 PM, Yingtao Tian  wrote:

> Hi All,
>
> I am trying to get round of how to put a thin film down at room
> temperature. I need a localised thin film with following properties:
>
> 1. non-transparent
> 2. as thin as possible - say in the order of few microns 3. easy to
> remove 4. can be applied at around room temperature
>
> I am thinking of some possible spray, but have not got any clue. I
> would appreciate if you have some  interesting idea about it.
>
>
> Thanks a lot.
>
> Regards,
> Yingtao
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