durusmail: mems-talk: Thin film deposition at room temperature
Thin film deposition at room temperature
2012-08-23
Yingtao Tian
Thin film deposition at room temperature
Rajul Patkar
2012-08-24
Hi,

To block UV, you can deposit chrome of 25 to 50nm by thermal evaporation.
Ion beam/metal sputter
may affect your photoresist.

Rajul.

On Fri, Aug 24, 2012 at 8:16 AM, Sudhin Thampi
wrote:

> If you don't want a uniform coating just apply photoresist using a cotton
> bud.
>
> Sudhin
>
> On Fri, Aug 24, 2012 at 1:43 AM, Jesse D Fowler  >wrote:
>
> > If you want to block UV with such a thin film, I would say your best bet
> > is a metal. Titanium is easy to coat and remove, for example.
> >
> > Or maybe spray-on sunscreen (probably not nearly strong enough to block
> an
> > exposure lamp)...
> >
> > Jesse Fowler
> >
> >
> >
> > From:   Yingtao Tian 
> > To:     General MEMS discussion ,
> > Date:   08/23/2012 11:55
> > Subject:        Re: [mems-talk] Thin film deposition at room temperature
> > Sent by:        mems-talk-bounces+jesse.d.fowler=aero.org@memsnet.org
> >
> >
> >
> > Hi Nabhiraj,
> >
> > I need some non-transparent film on photoresist to block the UV during
> the
> > next step exposure.
> >
> > Thanks,
> > Yingtao
> >
> > -----Original Message-----
> > From: mems-talk-bounces+y.tian=bham.ac.uk@memsnet.org [
> > mailto:mems-talk-bounces+y.tian=bham.ac.uk@memsnet.org] On Behalf Of
> > Nabhiraj Yalagoud
> > Sent: 23 August 2012 18:36
> > To: General MEMS discussion
> > Subject: Re: [mems-talk] Thin film deposition at room temperature
> >
> > Hello,
> > What film on what substrate you want?
> > Nabhiraj
> >
> > On Thu, Aug 23, 2012 at 8:41 PM, Yingtao Tian  wrote:
> >
> > > Hi All,
> > >
> > > I am trying to get round of how to put a thin film down at room
> > > temperature. I need a localised thin film with following properties:
> > >
> > > 1. non-transparent
> > > 2. as thin as possible - say in the order of few microns 3. easy to
> > > remove 4. can be applied at around room temperature
> > >
> > > I am thinking of some possible spray, but have not got any clue. I
> > > would appreciate if you have some  interesting idea about it.
> > >
> > >
> > > Thanks a lot.
> > >
> > > Regards,
> > > Yingtao
> > > _______________________________________________
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>
>
>
> --
> Sudhin Thampi
> Research Scholar
> Biomedical Devices and Technology
> IITM, SCTIMST and CMC
> Chennai-36
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
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>



--
Regards,
Rajul.
_______________________________________________
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