I am working on microfluidics and have the opportunity to use an older FEI
FIB. My concern this whole time has been to reduce jagged edges by not
using a rastered master, originally I was thinking of building my own 405nm
laser cutter that wouldn't pulse the beam while it traced my lines.

With the FIB I'm thinking I could master gold-sputtered glass or quartz,
then do contact lithography. Since the FIB does rastering, I'm again
concerned with nanometer jaggies. Is there some way I can blur the
lithography step a bit to smooth the edges? Or maybe make features smaller
than they should be, then chemically etch the master for a brief time?

--
-Nathan
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