durusmail: mems-talk: How do I blur a FIB made master to reduce rough edges?
How do I blur a FIB made master to reduce rough edges?
2012-11-05
Nathan McCorkle
2012-11-05
Brian Stahl
2012-11-08
Nathan McCorkle
2012-11-08
Kevin Nichols
2012-11-09
Nathan McCorkle
2012-11-08
MRC gmail
2012-11-09
Nathan McCorkle
How do I blur a FIB made master to reduce rough edges?
Nathan McCorkle
2012-11-05
I am working on microfluidics and have the opportunity to use an older FEI
FIB. My concern this whole time has been to reduce jagged edges by not
using a rastered master, originally I was thinking of building my own 405nm
laser cutter that wouldn't pulse the beam while it traced my lines.

With the FIB I'm thinking I could master gold-sputtered glass or quartz,
then do contact lithography. Since the FIB does rastering, I'm again
concerned with nanometer jaggies. Is there some way I can blur the
lithography step a bit to smooth the edges? Or maybe make features smaller
than they should be, then chemically etch the master for a brief time?

--
-Nathan
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