Hi Brian, yesterday I sat down with the FIB guy I just met and he went over most of the instrument and principals, so yes defocusing would help I think. I'm making 1-50 micron wide channels, but I've heard that corners can cause pressure drops in fluidic channels (which I aim to make) which can cause salts and proteins to crystallize and build up potentially even blocking the channel. I don't know what undulation 'frequency' would be best, but I figure I should start by not seeing anything visible at 500X optical magnification, so what can you resolve at that mag, I'd say ballpark 0.3 microns. On Mon, Nov 5, 2012 at 3:22 PM, Brian Stahlwrote: > Dear Nathan, > > I'm not a FIB expert but I have used an FEI Helios Dualbeam a little bit; I > think you should be able to defocus the ion beam slightly to blur/smooth > edges during patterning. I would think that an isotropic chemical etch > after patterning would also smooth out some edge roughness (potentially at > the expense of overall resolution). What feature size are you trying to > pattern that you're worried about LER? > > Best regards, > > Brian > > -- > Brian C. Stahl > Graduate Student Researcher > UCSB Materials Research Laboratory > brian.stahl@gmail.com / bstahl@mrl.ucsb.edu > Cell: (805) 748-5839 > Office: MRL 3117A > > > On Sun, Nov 4, 2012 at 3:30 AM, Nathan McCorkle wrote: > > > I am working on microfluidics and have the opportunity to use an older > FEI > > FIB. My concern this whole time has been to reduce jagged edges by not > > using a rastered master, originally I was thinking of building my own > 405nm > > laser cutter that wouldn't pulse the beam while it traced my lines. > > > > With the FIB I'm thinking I could master gold-sputtered glass or quartz, > > then do contact lithography. Since the FIB does rastering, I'm again > > concerned with nanometer jaggies. Is there some way I can blur the > > lithography step a bit to smooth the edges? Or maybe make features > smaller > > than they should be, then chemically etch the master for a brief time? > > > > -- > > -Nathan > > _______________________________________________ > > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > > provider of MEMS and Nanotechnology design and fabrication services. > > Visit us at http://www.mems-exchange.org > > > > Want to advertise to this community? See http://www.memsnet.org > > > > To unsubscribe: > > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > -- -Nathan _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk