durusmail: mems-talk: How do I blur a FIB made master to reduce rough edges?
How do I blur a FIB made master to reduce rough edges?
2012-11-05
Nathan McCorkle
2012-11-05
Brian Stahl
2012-11-08
Nathan McCorkle
2012-11-08
Kevin Nichols
2012-11-09
Nathan McCorkle
2012-11-08
MRC gmail
2012-11-09
Nathan McCorkle
How do I blur a FIB made master to reduce rough edges?
Kevin Nichols
2012-11-08
Nathan,

If you can, you might get better advice by explaining what you want to
build in more detail. FIB for microfluidics sounds like overkill.
There's almost certainly a better, cheaper way to get what you want.

- Kevin

On Wed, Nov 7, 2012 at 6:54 PM, Nathan McCorkle  wrote:
> Hi Brian,
> yesterday I sat down with the FIB guy I just met and he went over most of
> the instrument and principals, so yes defocusing would help I think. I'm
> making 1-50 micron wide channels, but I've heard that corners can cause
> pressure drops in fluidic channels (which I aim to make) which can cause
> salts and proteins to crystallize and build up potentially even blocking
> the channel.
>
> I don't know what undulation 'frequency' would be best, but I figure I
> should start by not seeing anything visible at 500X optical magnification,
> so what can you resolve at that mag, I'd say ballpark 0.3 microns.
>
>
> On Mon, Nov 5, 2012 at 3:22 PM, Brian Stahl  wrote:
>
>> Dear Nathan,
>>
>> I'm not a FIB expert but I have used an FEI Helios Dualbeam a little bit; I
>> think you should be able to defocus the ion beam slightly to blur/smooth
>> edges during patterning.  I would think that an isotropic chemical etch
>> after patterning would also smooth out some edge roughness (potentially at
>> the expense of overall resolution).  What feature size are you trying to
>> pattern that you're worried about LER?
>>
>> Best regards,
>>
>> Brian
>>
>> --
>> Brian C. Stahl
>> Graduate Student Researcher
>> UCSB Materials Research Laboratory
>> brian.stahl@gmail.com / bstahl@mrl.ucsb.edu
>> Cell: (805) 748-5839
>> Office: MRL 3117A
>>
>>
>> On Sun, Nov 4, 2012 at 3:30 AM, Nathan McCorkle  wrote:
>>
>> > I am working on microfluidics and have the opportunity to use an older
>> FEI
>> > FIB. My concern this whole time has been to reduce jagged edges by not
>> > using a rastered master, originally I was thinking of building my own
>> 405nm
>> > laser cutter that wouldn't pulse the beam while it traced my lines.
>> >
>> > With the FIB I'm thinking I could master gold-sputtered glass or quartz,
>> > then do contact lithography. Since the FIB does rastering, I'm again
>> > concerned with nanometer jaggies. Is there some way I can blur the
>> > lithography step a bit to smooth the edges? Or maybe make features
>> smaller
>> > than they should be, then chemically etch the master for a brief time?
>> >
>> > --
>> > -Nathan
>> > _______________________________________________
>> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
>> > provider of MEMS and Nanotechnology design and fabrication services.
>> > Visit us at http://www.mems-exchange.org
>> >
>> > Want to advertise to this community?  See http://www.memsnet.org
>> >
>> > To unsubscribe:
>> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>> >
>> _______________________________________________
>> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
>> provider of MEMS and Nanotechnology design and fabrication services.
>> Visit us at http://www.mems-exchange.org
>>
>> Want to advertise to this community?  See http://www.memsnet.org
>>
>> To unsubscribe:
>> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>>
>
>
>
> --
> -Nathan
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply