durusmail: mems-talk: How do I blur a FIB made master to reduce rough edges?
How do I blur a FIB made master to reduce rough edges?
2012-11-05
Nathan McCorkle
2012-11-05
Brian Stahl
2012-11-08
Nathan McCorkle
2012-11-08
Kevin Nichols
2012-11-09
Nathan McCorkle
2012-11-08
MRC gmail
2012-11-09
Nathan McCorkle
How do I blur a FIB made master to reduce rough edges?
Brian Stahl
2012-11-05
Dear Nathan,

I'm not a FIB expert but I have used an FEI Helios Dualbeam a little bit; I
think you should be able to defocus the ion beam slightly to blur/smooth
edges during patterning.  I would think that an isotropic chemical etch
after patterning would also smooth out some edge roughness (potentially at
the expense of overall resolution).  What feature size are you trying to
pattern that you're worried about LER?

Best regards,

Brian

--
Brian C. Stahl
Graduate Student Researcher
UCSB Materials Research Laboratory
brian.stahl@gmail.com / bstahl@mrl.ucsb.edu
Cell: (805) 748-5839
Office: MRL 3117A


On Sun, Nov 4, 2012 at 3:30 AM, Nathan McCorkle  wrote:

> I am working on microfluidics and have the opportunity to use an older FEI
> FIB. My concern this whole time has been to reduce jagged edges by not
> using a rastered master, originally I was thinking of building my own 405nm
> laser cutter that wouldn't pulse the beam while it traced my lines.
>
> With the FIB I'm thinking I could master gold-sputtered glass or quartz,
> then do contact lithography. Since the FIB does rastering, I'm again
> concerned with nanometer jaggies. Is there some way I can blur the
> lithography step a bit to smooth the edges? Or maybe make features smaller
> than they should be, then chemically etch the master for a brief time?
>
> --
> -Nathan
> _______________________________________________
> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
> provider of MEMS and Nanotechnology design and fabrication services.
> Visit us at http://www.mems-exchange.org
>
> Want to advertise to this community?  See http://www.memsnet.org
>
> To unsubscribe:
> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply