Dear Nathan, I'm not a FIB expert but I have used an FEI Helios Dualbeam a little bit; I think you should be able to defocus the ion beam slightly to blur/smooth edges during patterning. I would think that an isotropic chemical etch after patterning would also smooth out some edge roughness (potentially at the expense of overall resolution). What feature size are you trying to pattern that you're worried about LER? Best regards, Brian -- Brian C. Stahl Graduate Student Researcher UCSB Materials Research Laboratory brian.stahl@gmail.com / bstahl@mrl.ucsb.edu Cell: (805) 748-5839 Office: MRL 3117A On Sun, Nov 4, 2012 at 3:30 AM, Nathan McCorklewrote: > I am working on microfluidics and have the opportunity to use an older FEI > FIB. My concern this whole time has been to reduce jagged edges by not > using a rastered master, originally I was thinking of building my own 405nm > laser cutter that wouldn't pulse the beam while it traced my lines. > > With the FIB I'm thinking I could master gold-sputtered glass or quartz, > then do contact lithography. Since the FIB does rastering, I'm again > concerned with nanometer jaggies. Is there some way I can blur the > lithography step a bit to smooth the edges? Or maybe make features smaller > than they should be, then chemically etch the master for a brief time? > > -- > -Nathan > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk