durusmail: mems-talk: Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
2015-07-01
Improving adhesion of sputtered metals on borofloat glass
Gianmario Scotti
2015-06-30
Hey all,


I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at
various ways to improve it. Could you suggest some?



mario






--
Gianmario Scotti

Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology
Viikinkaari 5E (PO Box 56) FI-00014
http://www.helsinki.fi/pharmacy/chemtech/en/index.html


Visiting researcher
Aalto University, School of Electrical Engineering
http://elec.aalto.fi/en/ 

Micronova, Tietotie 3
02150 Espoo
Finland
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