durusmail: mems-talk: Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
Improving adhesion of sputtered metals on borofloat glass
2015-07-01
Improving adhesion of sputtered metals on borofloat glass
michael.martin@louisville.edu
2015-06-30
Hi Mario,
   Nickle is a great adhesion layer, though if you are doing electrochemistry I
would use tantalum.

Regards,
  Michael
________________________________________
From: mems-talk-bounces+michael.martin=louisville.edu@memsnet.org [mems-talk-
bounces+michael.martin=louisville.edu@memsnet.org] on behalf of Gianmario Scotti
[gianmario.scotti@gmail.com]
Sent: Thursday, June 25, 2015 6:20 AM
To: General MEMS discussion
Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass

Hey all,


I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at
various ways to improve it. Could you suggest some?



mario






--
Gianmario Scotti

Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology
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