Chrome should work. We've not had problems with it. Check the cleanliness of
your parts and make sure your system is leak tight. We've had issues in the
past when our chrome source was oxidized.
A good alternative is titanium. It works very well with platinum.
Dan
-----Original Message-----
From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org [mailto:mems-talk-
bounces+dan.ruiz=honeywell.com@memsnet.org] On Behalf Of
michael.martin@louisville.edu
Sent: Tuesday, June 30, 2015 1:59 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass
Hi Mario,
Nickle is a great adhesion layer, though if you are doing electrochemistry I
would use tantalum.
Regards,
Michael
________________________________________
From: mems-talk-bounces+michael.martin=louisville.edu@memsnet.org [mems-talk-
bounces+michael.martin=louisville.edu@memsnet.org] on behalf of Gianmario Scotti
[gianmario.scotti@gmail.com]
Sent: Thursday, June 25, 2015 6:20 AM
To: General MEMS discussion
Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass
Hey all,
I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at various
ways to improve it. Could you suggest some?
mario
--
Gianmario Scotti
Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology Viikinkaari 5E (PO Box 56)
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