Hello Andrè,


I was planning on doing an oxygen plasma cleaning step. Thank you for
confirming that this idea might help.


mario

On Wed, Jul 1, 2015 at 7:58 AM, André Bödecker <
aboedecker@imsas.uni-bremen.de> wrote:

> Hello Mario,
>
> a good cleaning step can improve the adhesion of sputtered layers,
> especially on borofloat wafers.
>
> Regards,
> André Bödecker
>
> -----Ursprüngliche Nachricht-----
> Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org
> [mailto:mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im
> Auftrag von michael.martin@louisville.edu
> Gesendet: Dienstag, 30. Juni 2015 22:59
> An: General MEMS discussion
> Betreff: Re: [mems-talk] Improving adhesion of sputtered metals on
> borofloat
> glass
>
> Hi Mario,
>    Nickle is a great adhesion layer, though if you are doing
> electrochemistry I would use tantalum.
>
> Regards,
>   Michael
> ________________________________________
> From: mems-talk-bounces+michael.martin=louisville.edu@memsnet.org
> [mems-talk-bounces+michael.martin=louisville.edu@memsnet.org] on behalf of
> Gianmario Scotti [gianmario.scotti@gmail.com]
> Sent: Thursday, June 25, 2015 6:20 AM
> To: General MEMS discussion
> Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
> glass
>
> Hey all,
>
>
> I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
> chromium as adhesion layer. Adhesion seems poor, and I am looking at
> various
> ways to improve it. Could you suggest some?
>
>
>
> mario
>
>
>
>
>
>
> --
> Gianmario Scotti
>
> Post-doc researcher
> Helsinki University
> Division of Pharmaceutical Chemistry and Technology Viikinkaari 5E (PO Box
> 56) FI-00014
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--
Gianmario Scotti

Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology
Viikinkaari 5E (PO Box 56) FI-00014
http://www.helsinki.fi/pharmacy/chemtech/en/index.html


Visiting researcher
Aalto University, School of Electrical Engineering
http://elec.aalto.fi/en/ 

Micronova, Tietotie 3
02150 Espoo
Finland
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

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