Hello Mario,
a good cleaning step can improve the adhesion of sputtered layers,
especially on borofloat wafers.
Regards,
André Bödecker
-----Ursprüngliche Nachricht-----
Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org
[mailto:mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im
Auftrag von michael.martin@louisville.edu
Gesendet: Dienstag, 30. Juni 2015 22:59
An: General MEMS discussion
Betreff: Re: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass
Hi Mario,
Nickle is a great adhesion layer, though if you are doing
electrochemistry I would use tantalum.
Regards,
Michael
________________________________________
From: mems-talk-bounces+michael.martin=louisville.edu@memsnet.org
[mems-talk-bounces+michael.martin=louisville.edu@memsnet.org] on behalf of
Gianmario Scotti [gianmario.scotti@gmail.com]
Sent: Thursday, June 25, 2015 6:20 AM
To: General MEMS discussion
Subject: [mems-talk] Improving adhesion of sputtered metals on borofloat
glass
Hey all,
I am sputtering platinum on borofloat (i.e. "pyrex") glass using ~10 nm of
chromium as adhesion layer. Adhesion seems poor, and I am looking at various
ways to improve it. Could you suggest some?
mario
--
Gianmario Scotti
Post-doc researcher
Helsinki University
Division of Pharmaceutical Chemistry and Technology Viikinkaari 5E (PO Box
56) FI-00014
https://urldefense.proofpoint.com/v2/url?u=http-3A__www.helsinki.fi_pharmacy
_chemtech_en_index.html&d=AwICAg&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrH
lk&r=iuM4gMLa1Lu9rB1E3CyO_FZKwp19zNE1F2fh6h-VHUI&m=0cmX1qq5gVgqV4OGDFRtap2ne
AzEcn1KB8cwiSbazk4&s=yESeMzqE9qJoCEKLDfd5aYhSm_UPyOu6xAG37yVtNXA&e=
Visiting researcher
Aalto University, School of Electrical Engineering
https://urldefense.proofpoint.com/v2/url?u=http-3A__elec.aalto.fi_en_&d=AwIC
Ag&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=iuM4gMLa1Lu9rB1E3CyO_FZKw
p19zNE1F2fh6h-VHUI&m=0cmX1qq5gVgqV4OGDFRtap2neAzEcn1KB8cwiSbazk4&s=UA0xV_exl
Jz7ciI-2auMWZP11lFLz5CIJVEeoqzHOtw&e=
Micronova, Tietotie 3
02150 Espoo
Finland
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at
https://urldefense.proofpoint.com/v2/url?u=http-3A__www.mems-2Dexchange.org&
d=AwICAg&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=iuM4gMLa1Lu9rB1E3Cy
O_FZKwp19zNE1F2fh6h-VHUI&m=0cmX1qq5gVgqV4OGDFRtap2neAzEcn1KB8cwiSbazk4&s=l7e
g-UW7G2-CZ0z6xpz4BbB8r4PNavvUSnDABa33Nd0&e=
Want to advertise to this community? See
https://urldefense.proofpoint.com/v2/url?u=http-3A__www.memsnet.org&d=AwICAg
&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3AJ2bNrHlk&r=iuM4gMLa1Lu9rB1E3CyO_FZKwp1
9zNE1F2fh6h-VHUI&m=0cmX1qq5gVgqV4OGDFRtap2neAzEcn1KB8cwiSbazk4&s=ALXRzcSqy65
ZipNkbxDc0hsoJdwqZveMCTQ3vc8iAM8&e=
To unsubscribe:
https://urldefense.proofpoint.com/v2/url?u=http-3A__mail.mems-2Dexchange.org
_mailman_listinfo_mems-2Dtalk&d=AwICAg&c=SgMrq23dbjbGX6e0ZsSHgEZX6A4IAf1SO3A
J2bNrHlk&r=iuM4gMLa1Lu9rB1E3CyO_FZKwp19zNE1F2fh6h-VHUI&m=0cmX1qq5gVgqV4OGDFR
tap2neAzEcn1KB8cwiSbazk4&s=vas6fhpH1St4XLaNGZMXxuFtBlzg6HiCtF1EubUcPYc&e=
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org
Want to advertise to this community? See http://www.memsnet.org
To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk