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mems-talk
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DRIE (Helen Berney)
KOH (jafar j babaei)
DRIE (Sonbol Massoud-Ansari)
TMAH etch (Kaustubh Ramesh Bhate)
DRIE services (koblitz@microfab.de)
Vol 1 #36 - 5 msgs, Message 1: Polyimide film (Tanja Borzenko)
opening and closing orifices with piezo-electric devices (Abhinav Bhushan)
Amorphous silicon (Inna Mushkatinskaya)
(2 parts)
Gold polishing (Abhinav Bhushan)
(MSM-ICCN) Micro-Nano-Bio Tech, Puerto Rico, 2002 (Bart Romanowicz)