Probably the blockage has moved further downstream, and into the
vacuum solenoid. Try removing the solenoid and cleaning it.


On Wed, Dec 8, 2010 at 7:33 PM, Jia Yao  wrote:
> Hi all,
>
> I am having problem with spin coater. At first there were some photoresist
> going into the chuck all the way to the bottom so the program stopped
> automatically after a couple of seconds of running. Also the platform was
> very hard to rotate by hand. After I cleaned the pathway which has the
> photoresist, the platform moves freely but the vaccum is showing
> insufficient value. Is there something blocking the vacuum
> somewhere? How could I possibly check the block?
>
> Thank you very much!
>
> Jia